超精密薄膜涂布技术
ㆍ适用于低至高粘度液体的超精密薄膜涂布设备（支持 1–20,000 cP）
ㆍ国内首创气浮式设备（核心模块自主开发）
ㆍ根据药液粘度与目标厚度，提供最优解决方案
Air Floating Coater
TypeGlass Moving Coater
Speed10 ~ 140 mm/s (CF: 300mm/s)
ThicknessArray/CF: 1.4 ~ 4.8 ㎛
Air Floating Stage
悬浮精度30 ± 5 ㎛
Slit Die Coater (1G)
TypeNozzle Scan Type - 1Gantry
Speed10 ~ 150 mm/s
ThicknessArray/CF: 1.4 ~ 4.8 ㎛
PI: 5 ~ 20 ㎛
Slit Die Coater (2G)
TypeNozzle Scan Type - 2Gantry
Speed10 ~ 150 mm/s
ThicknessArray/CF: 1.4 ~ 4.8 ㎛
PI: 5 ~ 20 ㎛
R2R Coater
TypeR2R Coating (Slit Die)
Speed2 ~ 10 m/min
ThicknessMax. 300 ㎛
R2R Bench Tester
